Capacitive acceleration sensor

Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element

Reexamination Certificate

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Reexamination Certificate

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07398683

ABSTRACT:
The invention relates to measuring devices used in the measurement of acceleration and, more specifically, to capacitive acceleration sensors. The capacitive acceleration sensor according to the present invention contains a movable electrode (5) of the acceleration sensor supported at an axis of rotation (7). Several pairs of electrodes are utilized in the acceleration sensor according to the present invention. Advantages of symmetry are achieved with the acceleration sensor structure according to the present invention, and it enables reliable and efficient measuring of acceleration, in particular in small capacitive acceleration sensor designs.

REFERENCES:
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patent: 4736629 (1988-04-01), Cole
patent: 5065628 (1991-11-01), Benecke
patent: 5095762 (1992-03-01), Holm-Kennedy et al.
patent: 5723790 (1998-03-01), Andersson
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patent: 5892154 (1999-04-01), Negoro
patent: 5900550 (1999-05-01), Menzel
patent: 6000287 (1999-12-01), Menzel
patent: 6082197 (2000-07-01), Mizuno et al.
patent: 6122965 (2000-09-01), Seidel et al.
patent: 6829937 (2004-12-01), Mahon
patent: 6862795 (2005-03-01), Mahon
patent: 195 47 642 (1996-06-01), None
English Translation of Patent Abstract and Claim 1 of DE 195 47 642 A1 published Jun. 27, 1996.

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