Capacitive acceleration sensor

Details Capacitive acceleration sensor Capacitive acceleration sensor

1997-06-16

1999-05-04

Brock, Michael

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

7351429, G01P 15125

Patent

active

059005505

ABSTRACT:
An accelerometer includes an axis about which opposing sides having different mass and different capacitor plates sizes move in response to acceleration. The different size of capacitor plate improves linearity of the capacitor sensing structure.

REFERENCES:
patent: 4736629 (1988-04-01), Cole
patent: 5028876 (1991-07-01), Cadwell
patent: 5205171 (1993-04-01), O'Brien et al.
patent: 5220835 (1993-06-01), Stephan
patent: 5404749 (1995-04-01), Spangler
patent: 5448864 (1995-09-01), Stephan
patent: 5581035 (1996-12-01), Greiff

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