Capacitive acceleration detector

Details Capacitive acceleration detector Capacitive acceleration detector

1993-04-14

1995-05-02

Williams, Hezron E.

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

G01P 15125

Patent

active

054109159

ABSTRACT:
A capacitive acceleration detector in which a fixed electrode is provided on a supporting substrate of a pedestal except opposite a diaphragm of an acceleration detecting beam. A broken or missing acceleration detecting beam is reliably detected because the electrical capacitance between a movable electrode and the fixed electrode is almost zero when the acceleration detecting beam breaks off at the diaphragm.

REFERENCES:
patent: 4435737 (1984-03-01), Colton
patent: 5092171 (1992-03-01), Wallrafen
patent: 5092174 (1992-03-01), Reidemeister et al.
patent: 5228341 (1993-07-01), Tsuchitani et al.

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