Capacitive absolute pressure sensor

Details Capacitive absolute pressure sensor Capacitive absolute pressure sensor

1994-11-22

1996-06-18

Ledynh, Bot L.

Electricity: electrical systems and devices

Electrostatic capacitors

Variable

73718, 73724, H01G 700, G01L 912

Patent

active

055284523

ABSTRACT:
A capacitive absolute pressure sensor. The sensor includes a substrate having an electrode deposited thereon and a diaphragm assembly disposed on the substrate. As pressure increases, the diaphragm deflects, touches the electrode (in the touch mode), and changes the capacitance of the sensor. The changed capacitance is sensed to thus sense pressure changes. A buried feedthrough is used to sense the change in a capacitance in a chamber under the diaphragm and thus determine the pressure sensed. A vacuum in the chamber is maintained by proper selection of a thickness of a sensing electrode and an insulating layer, exposition thereof to a thermal cycle, and the hermetic bonding of the diaphragm assembly to the substrate.

REFERENCES:
patent: 4838088 (1989-06-01), Murakami
patent: 5241864 (1993-09-01), Addie et al.

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