Measuring and testing – Fluid pressure gauge – Diaphragm
Patent
1994-01-28
1996-02-06
Chilcot, Richard
Measuring and testing
Fluid pressure gauge
Diaphragm
73718, 73754, G01L 700
Patent
active
054888697
ABSTRACT:
The invention relates to a capacitive absolute pressure measurement sensor having a first element (2) in which is arranged a mobile electrode (4), a second element (6) in which is arranged a fixed electrode (8) situated facing and insulated from said mobile electrode (4), a connecting frame (10) interposed between the first element and the second element to define a chamber (12) insulated from the external environment and inside of which there is substantially zero pressure, and a reference volume (14) connected to the chamber. The first element (2) has the configuration of a membrane of substantially constant thickness and the reference volume (14) is arranged at least partially in the second element (6).
REFERENCES:
patent: 4815472 (1989-03-01), Wise et al.
patent: 4838088 (1989-06-01), Murakami
patent: 5041900 (1991-08-01), Chen et al.
patent: 5113868 (1992-05-01), Wise et al.
patent: 5186054 (1993-02-01), Sekimura
patent: 5207103 (1993-05-01), Wise et al.
Elektronik, E. Habokotte et al., Integrierbare Funktionsblocke und Systeme, vol. 39, 5 Jan. 1990, pp. 80-87 XP86381. No translation.
Biegel Ronald
Chilcot Richard
CSEM - Centre Suisse d'Electronique et de Microtechnique SA
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