Capacitative pressure sensor with ceramic membrane

Details Capacitative pressure sensor with ceramic membrane Capacitative pressure sensor with ceramic membrane

2007-07-18

2008-12-02

Allen, Andre J. (Department: 2855)

Measuring and testing

Fluid pressure gauge

Diaphragm

C073S715000, C073S718000, C073S754000, C361S283100

Reexamination Certificate

active

07458272

ABSTRACT:
A pressure sensor for sensing a fluid pressure in harsh environments such as the air pressure in a tire formed on a wafer substrate. Associated circuitry deposited in CMOS layers on the wafer substrate has a conductive layer at least partially overlying the associated circuitry, the conductive layer forming a first electrode of the capacitative sensor. A conductive membrane at least partially overlies the conductive layer, and is spaced from it to form a second electrode of the capacitative sensor. The conductive membrane separates fluid at a reference pressure and fluid at the pressure to be sensed such that the associated circuitry is configured to convert the deflection of the conductive membrane into an output signal indicative of the fluid pressure. The conductive membrane is at least partially formed from a ceramic material to provide corrosion and wear resistance. Metal ceramics can be deposited as a thin membrane with sufficient flexibility for sensing pressure and are generally well suited to semiconductor fabrication processes and electrically conductive so they can be used in capacitative type pressure sensors.

REFERENCES:
patent: 4531415 (1985-07-01), Orlowski et al.
patent: 4572000 (1986-02-01), Kooiman
patent: 5230248 (1993-07-01), Cucci et al.
patent: 5285097 (1994-02-01), Hirai
patent: 5369544 (1994-11-01), Mastrangelo
patent: 5442962 (1995-08-01), Lee
patent: 5853020 (1998-12-01), Widner
patent: 5965821 (1999-10-01), Grudzien
patent: 6405132 (2002-06-01), Breed et al.
patent: 6484080 (2002-11-01), Breed et al.
patent: 6526352 (2003-02-01), Breed et al.
patent: 6533316 (2003-03-01), Breed et al.
patent: 6591687 (2003-07-01), Bjoerkman et al.
patent: 6648367 (2003-11-01), Breed et al.
patent: 6662642 (2003-12-01), Breed et al.
patent: 6733036 (2004-05-01), Breed et al.
patent: 6738697 (2004-05-01), Breed
patent: 6741169 (2004-05-01), Magiawata et al.
patent: 6758089 (2004-07-01), Breed et al.
patent: 6768944 (2004-07-01), Breed et al.
patent: 7107855 (2006-09-01), Bjoerkman
patent: 7140085 (2006-11-01), Bjoerkman et al.
patent: 0261972 (1988-03-01), None
patent: 0756164 (1997-01-01), None
patent: WO 03/106952 (2003-12-01), None

Affiliated with

Also associated with

Rating

Capacitative pressure sensor with ceramic membrane does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Capacitative pressure sensor with ceramic membrane, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Capacitative pressure sensor with ceramic membrane will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4027880