Capacitative pressure sensor for oxidative environments

Details Capacitative pressure sensor for oxidative environments Capacitative pressure sensor for oxidative environments

2006-10-05

2009-06-23

Allen, Andre J. (Department: 2855)

Measuring and testing

Fluid pressure gauge

Diaphragm

C073S715000, C073S716000, C073S754000

Reexamination Certificate

active

07549342

ABSTRACT:
A capacitative pressure sensor (30) for harsh environments such as vehicle tires. The sensor has two opposing electrodes (36and50). One electrode is a membrane (50) that extends between fluid at a reference pressure and fluid at the pressure to be sensed. In use, the flexible membrane (50) deflects due to pressure differentials between the reference pressure and the fluid pressure. Associated circuitry converts the deflection into a signal indicative of the pressure to be sensed. The membrane is a laminate at least partially formed from a transition metal nitride because transition metal nitrides are a metal ceramics with high yield strength and metallic bonding that makes it suitable for use in extreme environments. They can also readily include an oxidizing component such as aluminium so that the membrane form a passivating surface oxide layer to protect it from oxidative failure.

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