Capacitance type sensor

Details Capacitance type sensor Capacitance type sensor

2006-01-24

2006-01-24

Deb, Anjan (Department: 2858)

Electricity: measuring and testing

Impedance, admittance or other quantities representative of...

Lumped type parameters

C073S780000

Reexamination Certificate

active

06989677

ABSTRACT:
Capacitance element electrodes (E1to E5) and a grounded reference electrode (E0) are formed on a substrate (20). At a position opposite to these electrodes (E0to E5), a displacement electrode (40) is disposed that is Z-axially deformable as a detective member (30) is externally operated to move Z-axially. The displacement electrode (40) cooperates with the reference electrode (E0) and capacitance element electrodes (E1to E5) to form capacitance elements (C0to C5), respectively. Each of the capacitance elements (C1to C5) is connected in series with the capacitance element (C0) with respect to a signal externally input. Changes in the capacitance values of the capacitance elements (C1to C5) as the detective member (30) is moved are detected to sense the displacement of the detective member (30).

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