Capacitance type sensitive element and a manufacturing method th

Details Capacitance type sensitive element and a manufacturing method th Capacitance type sensitive element and a manufacturing method th

1988-09-09

1990-01-09

Griffin, Donald A.

Electricity: electrical systems and devices

Electrostatic capacitors

Variable

29 2542, H01G 700, H01G 520

Patent

active

048932140

ABSTRACT:
A capacitance type sensitive element comprises a pair of electrode pairs formed on an insulating substrate and having opposite electrode faces perpendicular or slantingly formed with respect to a face of the insulating substrate; and a sensing material disposed between the opposite electrode faces of the electrodes and having electrical characteristics changed on the basis of the physical or chemical interaction between the sensing material and a substance to be detected.
A method for manufacturing a capacitance type sensitive element comprises the steps of forming a groove on an insulating substrate; forming a metallic thin film having a predetermined thickness on the insulating substrate having the groove; performing the etching of a predetermined pattern in a portion including a bottom face portion of the groove in the metallic thin film, and forming a pair of electrodes; coating the entire surface of the pair of electrodes and the insulating substrate with a humidity sensitive material, and thereafter hardening the coated humidity sensitive material; and patterning the hardened humidity sensitive material.
A method for manufacturing a capacitance type sensitive element may comprise the steps of forming a metallic thin film having a predetermined thickness on an insulating substrate; patterning the metallic thin film and forming a pair of electrodes at a predetermined distance; coating the entire surface of the insulating substrate including a pair of electrodes with a humidity sensitive material, and thereafter hardening the coated humidity sensitive material; and patterning the hardened humidity sensitive material.

REFERENCES:
patent: 4164868 (1979-08-01), Suntola
patent: 4393434 (1983-07-01), Imai et al.
patent: 4438480 (1984-03-01), Chambaz et al.
patent: 4632879 (1986-12-01), Tamaka et al.

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