Capacitance type semiconductor dynamic quantity sensor

Details Capacitance type semiconductor dynamic quantity sensor Capacitance type semiconductor dynamic quantity sensor

2007-10-02

2007-10-02

Williams, Hezron (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

C073S504140

Reexamination Certificate

active

10926137

ABSTRACT:
A capacitance type semiconductor dynamic quantity sensor includes a beam-shaped movable electrode displaceable in a predetermined direction in response to application of a dynamic quantity to a support substrate, and beam-shaped fixed electrodes which are fixedly supported on the support substrate and disposed so that the side surface thereof faces a side surface of the movable electrode. The applied dynamic quantity is detected on the basis of variation of electric capacitance between the side surface of the movable electrode and the side surface of the fixed electrodes. Countermeasures are included to prevent sticking between the fixed electrodes and the movable electrode.

REFERENCES:
patent: 5744719 (1998-04-01), Werner
patent: 6151966 (2000-11-01), Sakai et al.
patent: 6170332 (2001-01-01), MacDonald et al.
patent: 6450029 (2002-09-01), Sakai et al.
patent: 6494096 (2002-12-01), Sakai et al.
patent: 6543285 (2003-04-01), Hashimoto
patent: 6694814 (2004-02-01), Ishio
patent: 6960488 (2005-11-01), Brosnihan et al.
patent: 2002/0011107 (2002-01-01), Sakai et al.
patent: 2005/0061075 (2005-03-01), Sugiura
patent: A-11-304495 (1999-11-01), None

Affiliated with

Also associated with

Rating

Capacitance type semiconductor dynamic quantity sensor does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Capacitance type semiconductor dynamic quantity sensor, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Capacitance type semiconductor dynamic quantity sensor will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3896916