Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Reexamination Certificate
2007-09-25
2007-09-25
Chapman, John E. (Department: 2856)
Measuring and testing
Speed, velocity, or acceleration
Acceleration determination utilizing inertial element
C361S280000
Reexamination Certificate
active
11226249
ABSTRACT:
A capacitance type physical quantity sensor includes a sensor chip and a circuit chip. The sensor chip includes: a support substrate; a semiconductor layer; a movable electrode; and a fixed electrode. The sensor chip is stacked on the circuit chip such that the movable electrode and the fixed electrode face the circuit chip. The movable electrode has a thickness in a stacking direction. The sensor chip has a first distance between the movable electrode and the circuit chip and a second distance between the movable electrode and the support substrate. The thickness of the movable electrode is larger than the first distance and the second distance.
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patent: A-2002-151703 (2002-05-01), None
Notice of Preliminary Rejection from Korean Patent Office issued on Sep. 26, 2006 for the corresponding Korean patent application No. 10-2005-0086561 (a copy and English translation thereof).
Chapman John E.
DENSO CORPORATION
Posz Law Group , PLC
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