Capacitance type physical quantity sensor having sensor chip...

Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element

Reexamination Certificate

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C361S280000

Reexamination Certificate

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11226249

ABSTRACT:
A capacitance type physical quantity sensor includes a sensor chip and a circuit chip. The sensor chip includes: a support substrate; a semiconductor layer; a movable electrode; and a fixed electrode. The sensor chip is stacked on the circuit chip such that the movable electrode and the fixed electrode face the circuit chip. The movable electrode has a thickness in a stacking direction. The sensor chip has a first distance between the movable electrode and the circuit chip and a second distance between the movable electrode and the support substrate. The thickness of the movable electrode is larger than the first distance and the second distance.

REFERENCES:
patent: 6313529 (2001-11-01), Yoshihara et al.
patent: 6848310 (2005-02-01), Goto
patent: 6876093 (2005-04-01), Goto et al.
patent: 6935176 (2005-08-01), Goto et al.
patent: A-2002-151703 (2002-05-01), None
Notice of Preliminary Rejection from Korean Patent Office issued on Sep. 26, 2006 for the corresponding Korean patent application No. 10-2005-0086561 (a copy and English translation thereof).

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