Capacitance type physical quantity sensor

Radiant energy – Photocells; circuits and apparatus – Photocell controlled circuit

Reexamination Certificate

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C250S2140AG, C250S2140RC, C073S514320

Reexamination Certificate

active

11348260

ABSTRACT:
The capacitance type physical quantity sensor has a sensing part including a capacitor element generating a capacitance signal representing a magnitude of a physical quantity to be sensed, and a sensor circuit including a charge amplifier converting the capacitance signal into a voltage signal. The charge amplifier includes an operational amplifier applied with the capacitance signal at an inverting input terminal thereof and applied with a reference voltage at a non-inverting input terminal thereof, a first capacitor connected between the inverting input terminal and an output terminal of the operational amplifier, a feedback resistor connected in parallel to the first capacitor, and a switch connected in parallel to the first capacitor and configured to be closed to make a short circuit between the inverting input terminal and the output terminal upon receiving a refresh signal supplied from outside.

REFERENCES:
patent: 2006/0037393 (2006-02-01), Itakura et al.
patent: 2006/0175540 (2006-08-01), Tsuruhara
patent: 2006/0277995 (2006-12-01), Kutsuna
patent: 2007/0101814 (2007-05-01), Campbell et al.
“Single-Chip Surface Micromachined Integrated Gyroscope With 50°/h Allan Deviation” by J. A. Geen et al.; IEEE Journal of Solid-State Circuits, vol. 37, No. 12; Dec. 2002 (discussed on p. 1 in the spec.).
U.S. Appl. No. 11/253,802 filed Oct. 20, 2005.

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