Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
Reexamination Certificate
2006-02-14
2006-02-14
Kwok, Helen (Department: 2856)
Measuring and testing
Speed, velocity, or acceleration
Angular rate using gyroscopic or coriolis effect
C073S514320
Reexamination Certificate
active
06997054
ABSTRACT:
An inertial detecting device for detecting a change in capacitance of a sensor element caused by inertial force includes a displaceable unit. The displaceable unit includes a movable mass member which is displaceable in the direction of an inertial force and is supported in a space by a pair of beams fixed on the substrate. At least one pair of detection units for detecting the displacement of the displaceable unit are provided on the substrate. The detection unit includes a drive unit and a pair of sensing electrodes which are disposed opposite to the displaceable unit. Any gap can be freely set between the sensing electrode and the movable mass member, thereby changing the sensitivity of the detecting device in a wide range.
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Hartwell, et al.; “Signal Mask Lateral Tunneling Accelerometer”,IEEE,Cornell University, Ithaca, NY, pp. 340-344 (1998).
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