Capacitance type force sensors

Details Capacitance type force sensors Capacitance type force sensors

2006-10-10

2006-10-10

Benson, Walter (Department: 2858)

Electricity: measuring and testing

Impedance, admittance or other quantities representative of...

Lumped type parameters

C324S662000

Reexamination Certificate

active

07119552

ABSTRACT:
Capacitance element electrodes (E1to E5) and a grounded reference electrode (E0) are formed on a substrate (20). A displacement electrode (40) that is Z-axially displaced in accordance with a Z-axial movement of a detective member (30) externally operated, is disposed so as to be opposed to the above electrodes (E0to E5). The displacement electrode (40) cooperates with the reference electrode (E0) and the capacitance element electrodes (E1to E5) to form capacitance elements (C0to C5), respectively. Each of the capacitance elements (C1to C5) is connected to the capacitance element (C0) in series in relation to an externally input signal. Changes in the capacitance values of the capacitance elements (C1to C5) when the detective member (30) is moved, is detected by a signal processing circuit having hysteretic characteristics. Thereby, the displacement of the detective member (30) is detected.

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