Capacitance type dynamic quantity sensor device

Details Capacitance type dynamic quantity sensor device Capacitance type dynamic quantity sensor device

2005-04-05

2005-04-05

Nelms, David (Department: 2818)

Active solid-state devices (e.g., transistors, solid-state diode

Miscellaneous

C257S417000, C438S048000, C438S050000, C073S514160

Reexamination Certificate

active

06876093

ABSTRACT:
A capacitance type dynamic quantity sensor device includes a sensor chip having movable electrodes and sensor-chip side fixed electrodes disposed to confront the movable electrodes in a substrate surface horizontal direction X and a circuit chip disposed to confront the sensor chip. The movable electrodes are joined to the substrate through spring portions having degrees of freedom in the substrate surface horizontal direction X and the substrate surface vertical direction Z, so that the movable electrodes are displaceable in both the directions X and Z. A circuit-chip side fixed electrode is equipped at the site corresponding to the movable electrodes. The sensor chip and the circuit chip are electrically connected to each other through bump electrodes.

REFERENCES:
patent: 6313529 (2001-11-01), Yoshihara et al.
patent: 6694814 (2004-02-01), Ishio
patent: 20030154789 (2003-08-01), Sakai
patent: A-5-340960 (1993-12-01), None
patent: A-9-127148 (1997-05-01), None
patent: A-9-196684 (1997-07-01), None

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