Capacitance type dynamic quantity sensor

Details Capacitance type dynamic quantity sensor Capacitance type dynamic quantity sensor

2007-06-05

2007-06-05

Kwok, Helen (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

C073S514360

Reexamination Certificate

active

10920017

ABSTRACT:
A capacitance type dynamic quantity sensor has a first substrate, a second substrate disposed over the first substrate, and first and second electrodes each disposed on a main surface of a respective one of the first and second substrates. Each of the first and second electrodes has through-holes formed in a portion thereof. A third substrate is disposed between and connected to the main surface of each of the first and second substrates. A vibration member is mounted on the third substrate so as to confront the first and second electrodes with gaps therebetween. The vibration member is mounted on the third substrate to undergo vibrational movement in response to application of an acceleration or an angular velocity to the vibration member so that the capacitance type dynamic quantity sensor detects a dynamic quantity in accordance with a change in capacitance between the first and second electrodes due to vibrational movement of the vibration member.

REFERENCES:
patent: 5228341 (1993-07-01), Tsuchitani et al.
patent: 5350189 (1994-09-01), Tsuchitani et al.
patent: 5417312 (1995-05-01), Tsuchitani et al.
patent: 5456111 (1995-10-01), Hulsing, II
patent: 6035714 (2000-03-01), Yazdi et al.
patent: 6105427 (2000-08-01), Stewart et al.

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