Capacitance type accelerometer

Details Capacitance type accelerometer Capacitance type accelerometer

1989-10-31

1992-03-17

Williams, Hezron E.

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

73517B, 437 67, H01L 21283

Patent

active

050957520

ABSTRACT:
A capacitance type accelerometer, having a fist silicon plate formed a movable electrode which is moved according to acceleration, two second silicon plates which are disposed on both sides of the first silicon plate with a certain separation distance, and thermal oxide films which are respectively disposed between the first silicon plate except the movable electrode and the two second silicon plates and stick the first silicon plate except the movable electrode and the two second silicon plates together. And further, a capacitance type accelerometer, having, a silicon plate forming a movable electrode which is moved according to acceleration, glass plates respectively mounting a conductive layer thereon which are opposite to the silicon plate with a certain separation distance and are connected to both sides of the silicon plate except the movable electrode and lead wires which are respectively connected to the conductive layers through a groove formed between the silicon plate and the glass plates.

REFERENCES:
patent: 4400214 (1983-08-01), Ogawa et al.
patent: 4483194 (1984-11-01), Rudolf
patent: 4679434 (1987-07-01), Stewart
patent: 4746963 (1988-05-01), Uchida et al.
patent: 4849374 (1989-07-01), Chen et al.
patent: 4874719 (1989-10-01), Kurosawa
patent: 4922756 (1990-05-01), Henrion
patent: 4963505 (1990-10-01), Fujii et al.

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