Capacitance type acceleration sensor

Details Capacitance type acceleration sensor Capacitance type acceleration sensor

1995-10-25

1997-01-14

Williams, Hezron E.

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

7351438, 7351436, 361280, G01P 15125, H01G 700

Patent

active

055941710

ABSTRACT:
A compact capacitance type acceleration sensor in which a mass portion having a plurality of movable electrodes are arranged in a recess portion formed on the surface of a p-type single crystal silicon base plate under the condition that the mass portion can be displaced. A plurality of stationary electrodes are arranged at a position opposed to the movable electrodes being separate from the movable electrodes. The mass portion is elastically supported by a support from the lower side and also elastically supported by four beams from the lateral side. Due to the above structure, the damping characteristic of the mass portion can be improved.

REFERENCES:
patent: 5220835 (1993-06-01), Stephan
patent: 5352635 (1994-10-01), Tu et al.
patent: 5441300 (1995-08-01), Yokota et al.
patent: 5487305 (1996-01-01), Ristic et al.

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