Capacitance transducer article and method of fabrication

Details Capacitance transducer article and method of fabrication Capacitance transducer article and method of fabrication

1992-04-30

1994-06-07

Woodiel, Donald

Measuring and testing

Fluid pressure gauge

Diaphragm

29 2541, 73718, 3612833, G01L 708, G01L 912

Patent

active

053179226

ABSTRACT:
A capacitance transducer has a first hermetically sealed cavity adapted to deform in response to an applied force, such as pressure or acceleration, and a second hermetically sealed cavity adapted to resist deformation in response to such applied force. The cavities are formed between two doped silicon layers separated by a selectively etched electrically insulating spacer layer. Multiple medial electrically insulating cavity area spacer segments within the second cavity resist deformation thereof in response to the applied force to be measured. The capacitance transducer can be manufactured from doped silicon wafers using well developed silicon wafer processing techniques.

REFERENCES:
patent: 4287553 (1981-09-01), Braunlech
patent: 4420790 (1983-12-01), Golke et al.
patent: 4612599 (1986-09-01), Ziegler
patent: 4825335 (1989-04-01), Wilner
patent: 4838088 (1989-06-01), Murakami
patent: 5022270 (1991-06-01), Rud, Jr.

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