Capacitance sensor type measuring apparatus

Details Capacitance sensor type measuring apparatus Capacitance sensor type measuring apparatus

2007-05-01

2007-05-01

Hirshfeld, Andrew H. (Department: 2858)

Electricity: measuring and testing

Impedance, admittance or other quantities representative of...

Lumped type parameters

C324S688000, C324S684000

Reexamination Certificate

active

10795257

ABSTRACT:
A measuring apparatus having a probe that faces a surface of a target and is configured to supply AC current to the surface, measuring a voltage drop through a space between the probe and the surface, and obtaining a distance between the probe and the surface in accordance with the measured voltage drop. The apparatus includes a ground member facing, and apart from, the surface and configured to ground the surface by capacitive coupling, and a stage configured to hold either of the target and the probe and to move to define a measurement area on the surface. The ground member is configured so that the ground member faces all areas of the surface, with respect to each of a plurality of measurement areas on the surface defined by a position of the stage.

REFERENCES:
patent: 6310482 (2001-10-01), Hong
patent: 6315574 (2001-11-01), Kamieniecki et al.
patent: 6388436 (2002-05-01), Nodot et al.
patent: 6529263 (2003-03-01), Oguri et al.
patent: 2003/0020891 (2003-01-01), Tokita

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