Capacitance sensor

Details Capacitance sensor Capacitance sensor

1996-02-01

1998-02-17

Ledynh, Bot L.

Electricity: electrical systems and devices

Electrostatic capacitors

Variable

3612831, 73718, 73724, H01G 700, G01L 912

Patent

active

057197407

ABSTRACT:
A small and highly sensitive capacitance type pressure sensor is obtained by filling an alkali halide material such as KBr into a through-hole, forming a conductive thin film on the surface, and dissolving and removing the alkali halide material. An insulating plate disposed with a through-hole in the thickness direction is filled with a molten alkali halide material such as KBr. After forming a conductive thin film on the surface of the alkali halide material filled into the through-hole and the vicinity thereof, the alkali halide material is dissolved by water and removed. In this way, a diaphragm is made of the through-hole and the conductive thin film. A curve of the diaphragm caused by a pressure difference between the both faces of the conductive thin film is detected as a capacitance change between the conductive thin film and the electrode layer.

REFERENCES:
patent: 4530029 (1985-07-01), Beristain
patent: 4838088 (1989-06-01), Murakami
patent: 4894698 (1990-01-01), Hijikigawa et al.
patent: 4951174 (1990-08-01), Grantham et al.
patent: 5050034 (1991-09-01), Hegner et al.

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