Refrigeration – Structural installation – With electrical component cooling
Reexamination Certificate
2006-02-21
2006-02-21
Norman, Marc (Department: 3744)
Refrigeration
Structural installation
With electrical component cooling
C165S080200, C165S086000, C118S724000, C118S729000, C204S298090
Reexamination Certificate
active
07000418
ABSTRACT:
Described is a cooling system for use in the manufacture of substrates into magnetic disk memory in which cooling plates are positioned dynamically in relation to a substrate to be cooled. This enables positioning the cooling plates closer for more effective cooling. Positioning is controlled by capacitive measurements between the cooling plates and the substrate to be cooled.
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Hoffman Brian
Rogers James H.
Cole Stanley Z.
Intevac, Inc.
Norman Marc
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