Capacitance sensing circuit for membrane pressure sensor

Details Capacitance sensing circuit for membrane pressure sensor Capacitance sensing circuit for membrane pressure sensor

2009-03-03

2010-12-21

Allen, Andre J (Department: 2855)

Measuring and testing

Fluid pressure gauge

Diaphragm

C073S724000, C361S283100

Reexamination Certificate

active

07854170

ABSTRACT:
A capacitance sensing circuit for a membrane pressure sensor is provided. The sensing circuit has a controller, two switches in signal communication with the controller, a charge amplifier and a charge injector. The charge amplifier is connected to the switches via a sensor capacitor Csand a reference capacitor Cr. The sensor and reference capacitors are arranged in parallel with one another and a parasitic capacitance Cpto ground. The charge injector and amplifier are arranged in parallel connection between the capacitors and the controller. The controller is configured to determine a charge imbalance indicative of a pressure difference between membranes of the pressure sensor.

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