Capacitance probe for surface dielectric constant measurements

Details Capacitance probe for surface dielectric constant measurements Capacitance probe for surface dielectric constant measurements

2005-02-15

2005-02-15

Patidar, Jay (Department: 2858)

Electricity: measuring and testing

Impedance, admittance or other quantities representative of...

Lumped type parameters

C324S663000, C324S719000

Reexamination Certificate

active

06856146

ABSTRACT:
A fringing capacitance measurement probe and a method for determining a surface dielectric constant. The fringing capacitance measurement probe includes a planarized surface probe element for making interfacial planar contact with a measurement surface, the planarized surface having a metal conductive line portion and an insulating area portion to form a measuring area. The perimeter portion of the metal conductive line portion has a length greater than the perimeter length of the measuring area such that a fringing capacitance of the measurement surface may be determined.

REFERENCES:
patent: 4935700 (1990-06-01), Garbini et al.
patent: 5767687 (1998-06-01), Geist
patent: 6456082 (2002-09-01), Nowak et al.
patent: 6490920 (2002-12-01), Netzer
patent: 20030090277 (2003-05-01), Lechner et al.

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