Capacitance pressure sensor

Details Capacitance pressure sensor Capacitance pressure sensor

1998-12-07

2000-01-11

Oen, William

Measuring and testing

Fluid pressure gauge

Electrical

G01L 900, G01L 916

Patent

active

060123362

ABSTRACT:
A microelectromechanical (MEM) capacitance pressure sensor integrated with electronic circuitry on a common substrate and a method for forming such a device are disclosed. The MEM capacitance pressure sensor includes a capacitance pressure sensor formed at least partially in a cavity etched below the surface of a silicon substrate and adjacent circuitry (CMOS, BiCMOS, or bipolar circuitry) formed on the substrate. By forming the capacitance pressure sensor in the cavity, the substrate can be planarized (e.g. by chemical-mechanical polishing) so that a standard set of integrated circuit processing steps can be used to form the electronic circuitry (e.g. using an aluminum or aluminum-alloy interconnect metallization).

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