Capacitance pressure sensor

Details Capacitance pressure sensor Capacitance pressure sensor

1981-07-27

1983-06-28

Woodiel, Donald O.

Measuring and testing

Fluid pressure gauge

Diaphragm

73718, 361283, G01L 912

Patent

active

043898955

ABSTRACT:
A capacitive pressure sensor has a diaphragm means a portion of which is conductive which forms a first capacitor electrode. The sensor also has a reference disc means a portion of which is conductive which forms a second capacitive electrode. The diaphragm means and the reference disc means are supported in a spaced, over-lying relationship to each other by a peripheral spacer means. Responsive to pressure, the diaphragm means deflects relative to the reference disc means thus changing the capacitive spacing of the diaphragm means and the reference disc means. The diaphragm means, reference disc means and spacer means are formed from substantially the same material. The spacer means is disposed between the diaphragm means and the reference disc means adjacent their outer edges and the diaphragm means, reference disc means and spacer means are then fused together.

REFERENCES:
patent: 3962921 (1976-06-01), Lips
patent: 4084438 (1978-04-01), Lee et al.
patent: 4120206 (1978-10-01), Rud
patent: 4340409 (1982-07-01), Brooks
patent: 4345299 (1982-08-01), Ho

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