Capacitance humidity sensor

Details Capacitance humidity sensor Capacitance humidity sensor

1981-11-20

1983-07-12

Goldberg, Elliot A.

Electricity: electrical systems and devices

Electrostatic capacitors

Variable

733365, H01G 700

Patent

active

043934340

ABSTRACT:
A capacitance humidity sensor according to the disclosure a non-conductive base plate, electrodes oppositely arranged on the base plate, a metal compound membrane formed by ion-plating independently on the electrodes, the metal compound membrane being roughened on its surface by plasma etching and being active to the humidity, and a moisture permeable metal skin formed on the metal compound membrane. The metal compound is preferably an oxide or nitride of aluminum or magnesium.

REFERENCES:
patent: 2690403 (1954-09-01), Gutzeit
patent: 3350941 (1967-11-01), Misevich et al.
patent: 3492152 (1970-01-01), Cariou
patent: 4151034 (1979-04-01), Yamamoto

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