Capacitance height gage applied in reticle position detection sy

Details Capacitance height gage applied in reticle position detection sy Capacitance height gage applied in reticle position detection sy

1985-03-29

1987-08-11

Myracle, Jerry W.

Communications: electrical

Continuously variable indicating

With particular transmitter

324 61R, G08C 1910

Patent

active

046865314

ABSTRACT:
A capacitance height gage for positioning the reticle of an electron beam lithography apparatus. The gage includes a hybrid circuit substrate carrying four measuring and two reference capacitor circuits. Each has a driven plate, the four measuring plates disposed opposite the object surface to be measured, and the two reference plates disposed on the top of the substrate. Two ground plates are disposed a predetermine distance from the reference driven plates. The object surface comprises the ground plate for the four measuring driven plates. The reference plates calibrate the measuring plates.

REFERENCES:
patent: 4086528 (1978-04-01), Walton
patent: 4107555 (1978-08-01), Haas et al.

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