Capacitance difference detecting circuit and MEMS sensor

Details Capacitance difference detecting circuit and MEMS sensor Capacitance difference detecting circuit and MEMS sensor

2006-10-10

2006-10-10

Lee, Diane (Department: 2858)

Electricity: measuring and testing

Impedance, admittance or other quantities representative of...

Lumped type parameters

C324S686000, C073S504120, C073S504140, C073S514320

Reexamination Certificate

active

07119550

ABSTRACT:
Oscillators have capacitors, respectively, whose capacitances change according to an external force and generate first oscillating signals according to the capacitances. Each of the capacitors is disposed, for example, between a substrate and a mass body that is movably disposed to face the substrate and oscillates in a direction perpendicular to the substrate. A detecting unit detects a relative difference between the capacitances of the capacitors as a difference between frequencies of the first oscillating signals. An angular speed or acceleration applied in a horizontal direction of the substrate is calculated according to the frequency change detected by the detecting unit. Therefore, a capacitance difference detecting circuit and a MEMS sensor that detect a minute change in the capacitances of the two capacitors caused by the external force are formed.

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