Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Patent
1989-10-19
1992-03-03
Williams, Hezron E.
Measuring and testing
Speed, velocity, or acceleration
Acceleration determination utilizing inertial element
73516R, 361278, G01P 15125
Patent
active
050921746
ABSTRACT:
A capacitive acceleration sensor using a common PWB as one of the plates of the capacitive transducer and the wiring connections thereto. An acceleration input moves a capacitor plate to produce a measurable change in capacitance. An electronic signal conditioner accurately converts the capacitance output to a voltage signal to provide an acceleration sensor featuring accurate DC performance. The transducer and electronics are disposed on a PWB making up a complete sensor package. In a first embodiment, the capacitor comprises a fixed electrode on the PWB and a movable acceleration responsive electrode secured to a support by a conductive resilient member, the support coupled to an electrically conductive region on the PWB spaced from the fixed electrode by a guard ring to minimize stray charge between the capacitor electrodes. In a second embodiment, the movable capacitor electrode is supported at its center by a pair of electrically conductive members, one coupled to an electrically conductive region on a substrate spaced from the movable electrode by a sealing spacer. The fixed capacitor electrode is disposed either on the same substrate or a separate substrate on the opposite side of the movable electrode spaced from the movable electrode by a sealing spacer and having the fixed capacitor electrode thereon. The movable capacitor electrode can be secured at its center or at an edge and can be produced by stamping and/or photoetching and provide a single element where plural elements were previously required.
REFERENCES:
patent: 3709042 (1973-01-01), Lee et al.
patent: 4435737 (1984-03-01), Colton
patent: 4483194 (1984-11-01), Rudolf
Neubert, Hermann K. P., Instrument Transducers 2nd Ed, Pub. 1975 by Clarendon Press in Oxford, England, pp. 38, 264, 36, 51 & 39.
Kawate Keith W.
Reidemeister Eric P.
Haug John A.
McAndrews James P.
Miller Craig
Sharp Melvin
Texas Instruments Incorporated
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