Capacitance acceleration sensor

Details Capacitance acceleration sensor Capacitance acceleration sensor

1997-12-23

1999-11-02

Chapman, John E.

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

7351436, G01P 15125

Patent

active

059748800

ABSTRACT:
The present invention is intended to improve the output characteristics of a capacitance acceleration sensor to increase the stability on the detection accuracy by ensuring that a movable electrode can be displaced while remaining as constantly parallel with stationary electrodes as possible. The invention provides a capacitance acceleration sensor having a frame Fm which constitutes the body of the sensor, a movable electrode 13 which is disposed in the frame Fm and which is supported so as to be capable of being displaced in a specific direction in response to acceleration, and stationary electrodes 12 which are disposed so as to face the movable electrode 13 in the specific direction; and detecting the magnitude of an acceleration acting in the specific direction, on the basis of the change in an electrostatic capacitance caused by the variations in the distances between the electrodes. The capacitance acceleration sensor is characterized in that the movable electrode 13 is cantilevered by the frame Fm with a plurality of beams 14 which are provided in a plane parallel with the specific direction and which are capable of elastically flexing in the specific direction.

REFERENCES:
patent: 4663972 (1987-05-01), Gerard
patent: 5597956 (1997-01-01), Ito et al.

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