Cap for use in a semiconductor wafer heat processing apparatus

Details Cap for use in a semiconductor wafer heat processing apparatus Cap for use in a semiconductor wafer heat processing apparatus

1998-02-05

1999-01-19

Vinson, Brian N..

Equipment for production, distribution, or transformation of ene

Distribution, modification or control

Semiconductor, transistor or integrated circuit

1303

Patent

active

D04043707

REFERENCES:
patent: 4857689 (1989-08-01), Lee
patent: 5314574 (1994-05-01), Takahashi
patent: 5320218 (1994-06-01), Yamashita et al.
patent: 5752796 (1998-05-01), Muka

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