Measuring and testing – Surface and cutting edge testing – Roughness
Patent
1996-09-12
1999-02-02
Larkin, Daniel S.
Measuring and testing
Surface and cutting edge testing
Roughness
G01B 528
Patent
active
058668055
ABSTRACT:
A force sensing cantilever for use in a scanning probe microscope has both a top side and a bottom side. From the bottom side extends a probe tip. The bottom side is coated with a thin film of a first material and the top side is coated with a thin film of a second material. The first and second materials may be the same or they may be different. The materials and thicknesses of the respective films are selected so as to create opposing forces to counter the tendency of such cantilevers to bend when a thin film is applied to only one side thereof.
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Han Wenhai
Jing Tianwei
Lindsay Stuart M.
Larkin Daniel S.
Molecular Imaging Corporation Arizona Board of Regents
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