Cantilevered soft landing boat loader for semiconductor processi

Details Cantilevered soft landing boat loader for semiconductor processi Cantilevered soft landing boat loader for semiconductor processi

1984-11-07

1987-06-09

Paperner, L. J.

Material or article handling

Chamber of a type utilized for a heating function and...

Charging of chamber

248279, 414180, B65G 2500

Patent

active

046717269

ABSTRACT:
A cantilevered, soft landing boat loading system for semiconductor processing furnaces includes an alignment mechanism, a paddle, and a boat loader. The alignment mechanism includes five handles for five degrees of freedom. The boat loader is supported from a vertical plane.

REFERENCES:
patent: 3272021 (1966-09-01), Weber
patent: 4008815 (1977-02-01), Fisk
patent: 4440538 (1984-04-01), Bowers
patent: 4468195 (1984-08-01), Sasaki et al.

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