Fishing – trapping – and vermin destroying
Patent
1988-12-09
1989-10-24
Chaudhuri, Olik
Fishing, trapping, and vermin destroying
414152, 432 9, 432 11, F16B 3924, F27D 300, F27D 500
Patent
active
048762253
ABSTRACT:
A system and method for loading and unloading articles, especially adapted for moving semiconductor wafers into and out of a diffusion chamber. An article support is cantilevered for moving the articles into the chamber without touching it. A separately controllable cantilvered enclosure is provided for movement over the supported wafers when necessary for protection during the loading and/or unloading procedure. An inert gas controllably flows into the enclosure to provide a controlled atmosphere for the wafers during the loading and/or unloading procedure.
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Guiver Harold C.
Wagner Edward A.
Berkeley Quartz Lab, Inc.
Chaudhuri Olik
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