Heating – Processes of heating or heater operation – Treating an article – container – batch or body as a unit
Patent
1983-12-01
1985-05-21
Camby, John J.
Heating
Processes of heating or heater operation
Treating an article, container, batch or body as a unit
432 23, 432123, 432239, 432258, F27D 300, F27D 500, F27B 904, F27B 914
Patent
active
045183490
ABSTRACT:
An improved semiconductor wafer handling system completely eliminates the need for boats, sleds, paddles, wheeled carriers, etc., customarily employed in transporting wafers during heat processing through the use of a plurality of rigid, polished cantilevered rods having a multiplicity of spaced slots for cooperatively holding wafers in an upright position. The system provides a means for achieving higher production yields of such semiconductor elements by generating fewer contaminating particles and through less exposure to ambient environment.
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Solid State Technology; "New from ACS Non-Contact Cantilever Loader"; p. 39, Oct., 1982, Semiconductor International.
Semiconductor International; "A Suspended Boat Loader Based on the Cantilever Principle" by J. L. Lambert et al., pp. 150-155; Apr., 1983.
Baeten Roger L.
Stach Joseph
Tressler Richard E.
Better Semiconductor Processes (BSP)
Camby John J.
Dunn Michael L.
Ellis Howard M.
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