Cantilevered boat-free semiconductor wafer handling system

Heating – Processes of heating or heater operation – Treating an article – container – batch or body as a unit

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432 23, 432123, 432239, 432258, F27D 300, F27D 500, F27B 904, F27B 914

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active

045183490

ABSTRACT:
An improved semiconductor wafer handling system completely eliminates the need for boats, sleds, paddles, wheeled carriers, etc., customarily employed in transporting wafers during heat processing through the use of a plurality of rigid, polished cantilevered rods having a multiplicity of spaced slots for cooperatively holding wafers in an upright position. The system provides a means for achieving higher production yields of such semiconductor elements by generating fewer contaminating particles and through less exposure to ambient environment.

REFERENCES:
patent: 3183130 (1965-05-01), Reynolds et al.
patent: 3604694 (1971-09-01), Muller
patent: 3735965 (1973-05-01), Way
patent: 3819067 (1974-06-01), Hammond
patent: 3923342 (1975-12-01), Shannon
patent: 3951587 (1976-04-01), Alliegro et al.
patent: 4075972 (1978-02-01), Yamawaki et al.
patent: 4153164 (1979-05-01), Hofmeister et al.
patent: 4218214 (1980-08-01), Nelson
patent: 4439146 (1984-03-01), Sugita
patent: 4459104 (1984-07-01), Wollmann
Solid State Technology; "New from ACS Non-Contact Cantilever Loader"; p. 39, Oct., 1982, Semiconductor International.
Semiconductor International; "A Suspended Boat Loader Based on the Cantilever Principle" by J. L. Lambert et al., pp. 150-155; Apr., 1983.

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