Cantilever with integrated deflection sensor

Details Cantilever with integrated deflection sensor Cantilever with integrated deflection sensor

1996-08-19

1998-04-14

Noland, Thomas P.

Measuring and testing

Surface and cutting edge testing

Roughness

7351436, 73862634, 73862639, G01B 734

Patent

active

057394253

ABSTRACT:
A cantilever for scanning probe microscopy and other force or deflection measurements is described. The cantilever includes at least one one integrated strain sensing element within a constriction section (62) . The cantilever is improved over known cantilevers by reducing the longitudinal extension of the constriction, such that its contribution to the total deflection of the cantilever is reduced. The design of the cantilever is further improved by applying a beam (63) with an essentially triangular cross section in either a vertical or a horizontal plane or both.

REFERENCES:
patent: 4249624 (1981-02-01), Kuhnle
patent: 4454770 (1984-06-01), Kistler
patent: 4464419 (1984-08-01), Horn
patent: 4577709 (1986-03-01), Shibahara et al.
patent: 4605919 (1986-08-01), Wilner
patent: 4670092 (1987-06-01), Motomedi
patent: 5021364 (1991-06-01), Akonira et al.
patent: 5239870 (1993-08-01), Kaneko
patent: 5321685 (1994-06-01), Nose et al.
patent: 5345815 (1994-09-01), Albrecht et al.
patent: 5354985 (1994-10-01), Quote
patent: 5444244 (1995-08-01), Kirk et al.
patent: 5537863 (1996-07-01), Fujiu et al.
patent: 5583286 (1996-12-01), Matsuyama
Patent Abstracts of Japan vol. 18, No. 231, Grp P1756, "Semiconductor Acceleration Detecting Device" ABS Pub. Date Jun. 17, 1994 (6-74966).
"Pick Up Cartridge" Patent Abstracts of Japan Abs Grp P005, vol. 4, No. 43, Abs Pub Date Apr. 4, 1980 (55-14570).
"Acceleration Sensor and Manufacture Thereof"; Patent Abstracts of Japan Abs Grp E1512, vol. 18, No. 105 Abs Pub Date Feb. 21, 1994 (5-304303).
"Integrated AFM Sensor and Manufacture Thereof" Patent Abstracts of Japan Abstract of (6-300557) Dated Oct. 28, 1994.
"Integrated Multifunction SPM Sensor" Patent Abstracts of Japan Abstract of (8-5642), Dated Jan. 12, 1996 Inventor Nobutoka Komiya.

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