Cantilever type probe needle for probe card and method of fabric

Details Cantilever type probe needle for probe card and method of fabric Cantilever type probe needle for probe card and method of fabric

1998-01-27

2000-01-18

Ballato, Josie

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

324762, H01B 102, H01B 502

Patent

active

060160616

ABSTRACT:
A probe needle for a probe card, and a method of fabrication and control thereof that prevents degradation in the reliability of a semiconductor device originating from an inspection process are provided. In a cantilever type probe needle for a probe card, a leading end of the probe needle is formed to include a first convex portion and a second convex portion separated from the first convex portion with a groove therebetween.

REFERENCES:
patent: 4423373 (1983-12-01), LeCroy
patent: 4560926 (1985-12-01), Cornu et al.
patent: 5435733 (1995-07-01), Chernicky et al.

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