Measuring and testing – Surface and cutting edge testing – Roughness
Patent
1998-07-21
2000-02-08
Larkin, Daniel S.
Measuring and testing
Surface and cutting edge testing
Roughness
G01B 734
Patent
active
060216654
ABSTRACT:
A scanning probe microscope including a scanner having a moving end movable in three-dimensional directions, a cantilever removably attached to the moving end, a displacement sensor including a light emitting element capable of applying a light beam to the cantilever and a light receiving element capable of receiving reflected light from the cantilever, and a position adjusting mechanism capable of adjusting the position of the displacement sensor so that the light beam from the light emitting element can always be applied at a constant angle of incidence to a constant position on the cantilever while the moving end of the scanner is being moved. The position adjusting mechanism includes a stationary system having a guide surface in a specific shape, a movable system movable along the guide surface in a manner such that the movable system supports the displacement sensor, and a drive system for causing the movable system to move along the guide surface, thereby translating and rotating the displacement sensor for given distances in given directions.
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Hayashi Yoshiaki
Itoh Shuichi
Larkin Daniel S.
Olympus Optical Co,. Ltd.
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