Cantilever stylus for use in an atomic force microscope and meth

Details Cantilever stylus for use in an atomic force microscope and meth Cantilever stylus for use in an atomic force microscope and meth

1991-05-14

1993-08-31

Noland, Tom

Measuring and testing

Surface and cutting edge testing

Roughness

250306, G01B 734, H01J 3720

Patent

active

052398633

ABSTRACT:
An atomic force microscope for observing a sample surface (7) is internally provided with a cantilever stylus (1, 14, 23) and makes use of atomic forces acting between the cantilever stylus (1, 14, 23) and the sample surface. The cantilever stylus (1, 14, 23) includes a cantilever (2, 15, 22) having a fixed end and a free end and having two principal surfaces. The cantilever stylus (1, 14, 23) further includes two tip portions formed in the principal surfaces of the free end, respectively. One of the two tip portions has a radius of curvature less than 0.1 .mu.m and protrudes beyond the other tip portion so that the former may be used to observe the sample surface (7).

REFERENCES:
patent: 4916002 (1990-04-01), Carver
patent: 5021364 (1991-06-01), Akamine et al.
patent: 5051379 (1991-09-01), Bayer et al.
"New Scanning Tunneling Microscopy Tip for Measuring Surface Topography", by Y. Akama et al., Journal of Vacuum Science & Technology, Jan./Feb. 1990, pp. 429-433.
"Scanning Tunneling Microscopy", by Paul Kansma, Journal of Applied Physics, 61 (1987) Jan. 15, No. 2, pp. R1-R23.
Patent Abstracts of Japan, vol. 12, No. 277 Jul. 30, 1988 (E-640) (3124) Abstract of (63-55845).
Abstract of 54-134964 Patent Abstracts of Japan, vol. 3, No. 155 E160 Dec. 19, 1979.
"Microfabrication of cantilever styli for the atomic force microscope", T. R. Albrecht, et al., Stanford University, Stanford, CA 94305, J. Vac. Sci. Technol. A8 (4), Jul./Aug. 1990, pp. 3386-3396.

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