Cantilever semiconductor device

Details Cantilever semiconductor device Cantilever semiconductor device

1985-10-01

1990-10-30

Goldstein, Herbert

Measuring and testing

Volume or rate of flow

Thermal type

156647, G01F 168

Patent

active

049660373

ABSTRACT:
A semiconductor device comprising a semiconductor body having a depression formed into the first surface of the body. The device further comprises member means comprising a thermal-to-electric transducer or static electric element, the member means having a predetermined configuration suspended over the depression. The member means is connected to the first surface so that the predetermined configuration is cantilevered over the depression, the depression opening to the first surface around at least a portion of the predetermined configuration. The depression provides substantial physical and thermal isolation between the element and the semiconductor body. In this manner, an integrated semiconductor device provides an environment of substantial physical and thermal isolation between the transducer or element and the semiconductor body.

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