Cantilever pressure transducer

Details Cantilever pressure transducer Cantilever pressure transducer

1994-06-10

1997-05-27

Dougherty, Thomas M.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

310332, 310328, H01L 4108

Patent

active

056335520

ABSTRACT:
Micromachined cantilever pressure transducers, which work both as microphones and as microspeakers, are disclosed. These devices are made possible by novel methods for producing flat, thin film multilayer or polymeric cantilevers.

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