Cantilever paddle for use with wafer boats

Details Cantilever paddle for use with wafer boats Cantilever paddle for use with wafer boats

1983-05-23

1985-05-14

Sheridan, Robert G.

Material or article handling

Chamber of a type utilized for a heating function and...

Charging of chamber

432239, 432242, 432253, F27D 500, B27B 914

Patent

active

045168970

ABSTRACT:
A cantilever wafer paddle system for use in the manufacture of semiconductor devices so the system having two support members positioned above and attached to a suspension member such that the suspension member is capable of supporting and suspending a series of wafer boats within a diffusion tube without allowing any portion of the paddle, boats or wafers contained within the boats to contact the internal walls of the diffusion tube.

REFERENCES:
patent: 646475 (1900-04-01), Swanger
patent: 2409284 (1946-10-01), Jackson
patent: 2501768 (1950-03-01), Fones
patent: 3744650 (1973-07-01), Henebry et al.
patent: 3811825 (1974-05-01), Enderlein
patent: 4412812 (1983-11-01), Sadowski et al.

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