Cantilever for use with atomic force microscope and process for

Details Cantilever for use with atomic force microscope and process for Cantilever for use with atomic force microscope and process for

1995-05-24

1997-03-25

Noland, Thomas P.

Measuring and testing

Surface and cutting edge testing

Roughness

G01B 528

Patent

active

056146639

ABSTRACT:
The improved cantilever for use with an atomic force microscope comprises a single-crystal silicon base 11 having adequate mechanical strength, a cantilever beam 12 that is made from a silicon oxide film and which is joined at one end to the base, and a conical stylus 13 with a sharp tip that is formed of single-crystal silicon on the cantilever beam 12 at the 6 other end which is opposite the end joined to the base 11, and all surfaces of the cantilever are covered with a thin electroconductive film 14. If desired, protective plates 15 for protecting the cantilever beam against mechanical damage may be provided that are processed from the base material in such a way that they hold the beam therebetween and which have satisfactory strength. The stylus has an abrupt profile with a sharp tip and a high aspect ratio, and the cantilever beam has an invariable spring constant and supports the stylus at an end. The cantilever can be produced by a process comprising steps (a)-(k).

REFERENCES:
patent: 5302239 (1994-04-01), Roe et al.
patent: 5354985 (1994-10-01), Quate
Binnig et al., Atomic Resolution with Atomic Force Microscope, Europhys. Lett., 3(12), 15 Jun. 1987, pp. 1281-1286.
Kikuta et al., Force Microscopy Using Common-Path Optical-Heterodyne Interferometer, Japanese Journal of Applied Physics, Part I, vol. 30, No. 3, Mar. 1991, pp. 587-590.
T.R Albrecht et al., Microfabrication of Cantilever Styli for the Atimic force Microscope, J. Vac Sci. Technol. A 8(4), Jul./Aug. 1990, pp. 3386-3396.
M.M. Farooqui et al., Micromachined Silicon Sensors for Atomic Force Microscopy, Nanotechnology 3 (1992), pp. 91-97.
L.C. Kong et al., Integrated Electrostatically Resonant Scan Tip for an Atomic Force Micriscope, J. Vac. Sci. Technol. B 11(3), May/Jun. 1993, pp. 634-641.

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