Cantilever for use in atomic force microscope and manufacturing

Measuring and testing – Surface and cutting edge testing – Roughness

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250306, 250307, G01B 528, G01N 2300

Patent

active

051933853

ABSTRACT:
A cantilever for an atomic force microscope includes a diamond stylus for opposing a sample for detecting an atomic force, a stylus holding element, at least a portion of which is made of a magnetic material, holding the diamond stylus, and a lever having a secured end and a free end to which the stylus holding element is fastened for being deformed in response to an atomic force acting between the diamond stylus and the sample. A method of manufacturing a cantilever for an atomic force microscope comprises securing a rough diamond stylus to a stylus holding element, at least a portion of the element being magnetic, forming a stylus by grinding the rough diamond, magnetizing the magnetic stylus holding element, applying an adhesive to the surface of a lever, securing the stylus holding element to the lever with the adhesive therebetween with a magnetic field in the vicinity of the lever, removing the magnetic field from the lever after the adhesive has hardened, and demagnetizing the stylus holding element.

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