Cantilever for scanning probe microscope including piezoelectric

Photocopying – Projection printing and copying cameras – Illumination systems or details

Patent

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

H01J 314

Patent

active

057423776

ABSTRACT:
A cantilever for a scanning probe microscope (SPM) includes a piezoelectric element in a thicker, less flexible section near the fixed base of the cantilever and a piezoresistor in a thinner, more flexible section near the free end of the cantilever. When the SPM operates in the constant force mode, the piezoelectric element is used to control the tip-sample separation. Since the resonant frequency of the piezoelectric element is substantially higher than that of conventional piezoelectric tube scanners, much higher scan rates can be achieved. When the SPM operates in the dynamic or intermittent contact mode, a superimposed AD-DC signal is applied to the piezoelectric element, and the latter is used to vibrate the cantilever as well as to control the tip-sample spacing. In another embodiment the cantilever is supported on a knife edge and vibrates at a third or higher order resonant frequency.

REFERENCES:
patent: 4479831 (1984-10-01), Sandow et al.
patent: 4724318 (1988-02-01), Binnig
patent: 5138174 (1992-08-01), Tang
patent: 5209117 (1993-05-01), Bennett
patent: 5210410 (1993-05-01), Barrett
patent: 5221415 (1993-06-01), Albrecht et al.
patent: 5227626 (1993-07-01), Okada et al.
patent: 5231286 (1993-07-01), Kajimura et al.
patent: 5254854 (1993-10-01), Betzig
patent: 5345815 (1994-09-01), Albrecht et al.
patent: 5354985 (1994-10-01), Quate
patent: 5406832 (1995-04-01), Gamble et al.
patent: 5444244 (1995-08-01), Kirk et al.
patent: 5537863 (1996-07-01), Fujiu et al.
"Integrated optics and new wave phenomena in optical waveguides", P.K. Tien, Reviews of Modern Physics, vol. 49, No. 2, Apr. 1977, pp. 361-362.
"Integrated Acoustooptic Circuits and Applications", Chen S. Tsai, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, vol. 39, No. 5, Sep. 1992, pp. 529-554.
"Guided-Wave Acousto-Optics Interactions, Devices and Applications", Chen S. Tsai (Ed.), Springer-Verlag, 1990, pp. 79 and 250-256.
"Near-field subwavelength micropattern generation: Pipette guided argon fluoride excimer laser microfabrication", M. Rudman et al., J. Appl. Phys. 72(9), 1 Nov. 1992, pp. 4379-4383.
"Optical characteristics of 0.1.mu.m circular apertures in a metal film as light sources for scanning ultramicroscopy", U.Ch. Fischer, J. Vac. Sci. Technol. B 3(1), Jan./Feb. 1985, pp. 386-390.
"Near-field optical microscope using a silicon-nitride probe", N.F. van Hulst et al., Appl. Phys. Lett. 62(5), 1 Feb. 1993, pp. 461-463.
"Near-field optical scanning microscopy in reflection", U.Ch. Fischer, Appl. Phys. Lett. 52(4), 25 Jan. 1988, pp. 249-251.
"Micron-Size Optical Waveguide for Optoelectronic Integrated Circuits", T. Nagata et al., Extended Abstracts of the 1993 International Conference on Solid State Devices and Materials, Makuhari, 1993, pp. 1047-1049.
"A Light Source Smaller Than the Optical Wavelength", K. Lieberman et al., Science, vol. 247, 5 Jan. 1990, pp. 59-61.
"Near-field differential scanning optical microscope with atomic force regulation", R. Toledo-Crow et al., Appl. Phys. Lett. 60(24), 15 Jun. 1992, pp. 2957-2959.
"Near-Field Optics: Microscopy, Spectroscopy, and Surface Modification Beyond the Diffraction Limit", Eric Betzig et al., Science vol. 257, 10 Jul. 1992, pp. 189-195.
"Breaking the Diffraction Barrier: Optical Microscopy on a Nanometric Scale", E. Betzig et al., Science vol. 251, 22 Mar. 1991, pp. 1468-1470.
"Combined shear force and near-field scanning optical microscopy", E. Betzig et al., Appl. Phys. Lett. 60(20), 18 May 1992, pp. 2484-2486.
N. Barniol et al., "Modification of HF-Treated Silicon (100) Surfaces by Scanning Tunneling Microscopy in Air Under Imaging Conditions", Appl. Phys. Lett., vol. 61, No. 4, 27 Jul. 1992, 1992 American Institute of Physics, pp. 462-264.
J.A. Dagata et al., "Modification of Hydrogen-Passivated Silicon By a Scanning Tunneling Microscope Operating in Air", Appl. Phys. Lett., vol. 56, No. 20, 14 May 1990, pp. 2001-2003.
J.A. Dagata et al., Pattern Generation on Semiconductor Surfaces By a Scanning Tunneling Microscope Operating in Air, J. Vac. Sci. Technol. B. vol. 9, No. 2, Mar./Apr. 1991, pp. 1384-1388.
Sugimura, et al., "Maskless Patterning of Silicon Surface Based on Scanning Tunneling Microscope Tip-Induced Anodization and Chemical Etching", Appl. Phys. Lett., vol. 65, No. 12, 19 Sep. 1994, pp. 1569-1571.
Wang et al., "Nanometer-Structure Writing on SI(100) Surfaces Using a Non-Contact-Mode Atomic Force Microscope", Appl. Phys. Lett., vol. 65, No. 11, 12 Sep. 1994, pp. 1415-1417.
Wolf et al., "Silicon Processing For the VLSI ERA vol. 1: Process Technology", Lattice Press, 1986, pp. 209-210.
"Thermomechanical writing with an atomic force microscope tip", H.J. Mamin et al., Appl. Phys. Lett. 61(8), 24 Aug. 1992, pp. 1003-1005.
"The atomic force microscope used as a powerful tool for machining surfaces", T.A. Jung et al., Elsevier Science Publishers, 1992, pp. 1446-1451.
"25 nm chromium oxide lines by scanning tunneling lithography in air", H.J. Song et al., 38th Int'l. Symp. on Electron, Ion and Photon Beams, New Orleans, LA, May 31-Jun. 3, 1994, pp. 16 pgs.
"Nanometer-scale lithography using the atomic force microscope", A. Majumdar et al., Appl. Phys. Lett. 61(19), 9 Nov. 1992, pp. 2293-2295.
"Tip-induced anodization of titanium surfaces by scanning tunneling microscopy: A humidity effect on nanolithography", H. Sugimar et al., Appl. Phys. Lett. 62(9), 30 Aug. 1993, pp. 1288-1290.
"Nanometer scale patterning of silicon (100) surfaces by an atomic force microscope operating in air",L. Tsau et al., Appl. Phys. Lett. 64(16), 18 Apr. 1994, pp. 2133-2135.
"Fabrication of Si nanostructures with an atomic force microscope", E.S. Snow et al., Appl. Phys. Lett. 64(15), 11 Apr. 1994, pp. 1932-1934.
"Lithographic patterning of self-assemble films", J.M. Calvert, J. Vac. Sci. Technol. B 11(6), Nov./Dec. 1993, pp. 2155-2163.
"Self-assembled monolayer electron beam resist on GaAs", R.C. Tiberio et al., Appl. Phys. Lett. 62(5), 1 Feb. 1993, pp. 476-478.
"Low voltage electron beam lithography in self-assembled ultrathin films with the scanning tunneling microscope", C.R.K. Marrian et al, Appl. Phys. Lett. 64(3), 17 Jan. 1994, pp. 390-392.
"Scanning Probe Lithography. 1. Scanning Tunneling Microscope Induced Lithography of Self-Assembled n-Alkanethiol Monolayer Resists", C.B. Ross et al., American Chemical Society, Langmuir, vol. 9, No. 3, 1993, pp. 632-636.
"Modification of Silicon Surface Produced by Electric Field Enhanced Oxidation Through Native Oxide", Y. Ejiri et al., Extended Abstracts of 1993 Int'l. Con. on Solid State Devices and Materials, 1993, pp. 606-608.
"Fabrication of silicon nanostructures with a scanning tunneling microscope", E.S. Snow et al., Appl. Phys. Lett. 63(6), 9 Aug. 1993, pp. 749-751.
"Nanometre-scale chemical modification using a scanning tunnelling microscope", Y. Utsugi, Nippon Telegraph and Telephone Corp., LSI Laboratories, undated, 2 pgs.
"Atomic Force Microscopy Using A Piezoresistive Cantilever", M. Tortonese et al., IEEE, Mar. 1991, pp. 448-450.
"Applications of Atomic Force Microscopy for Nanolithography", P.I. Oden et al., undated, 7 pgs.
Technology of proximal probe lithography, "Principles and Techniques of STM Lithography", M.A. McCord et al, 1993, The Society of Photo-Optical Instrumentation Engineers, pp. 16-32.
Technology of proximal probe lithography, "Low Voltage E-Beam Lithography With The STM", C.R.K. Marrian et al, 1993, The Society of Photo-Optical Instrumentation Engineers, pp. 58-73.
Technology of proximal probe lithography, "The Technology of Proximal Probe Lithography: An Overview", J.A. Dagata et al, 1993, The Society of Photo-Optical Instrumentation Engineers, pp. 3-11.
"Nanometer Lithography on Silicon and Hydrogenated Amouphous Silicon wth Low Energy Electrons", Kramer et al., abstract, International Conference on Micro and Nanofabrication, Sep. 1994.
N. Kramer et al., "Fabrecation of Matallic Nanowires With a Scanning Tunneling Microscope", 1995 American Institute of Physics, Appl. Phys. Lett. 66 (11), 13 Mar. 1995, pp. 1325-1327.
"Silicon transfer layer for multilayer resi

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Cantilever for scanning probe microscope including piezoelectric does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Cantilever for scanning probe microscope including piezoelectric, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Cantilever for scanning probe microscope including piezoelectric will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-2063358

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.