Cantilever for atomic force microscope and method of manufacturi

Details Cantilever for atomic force microscope and method of manufacturi Cantilever for atomic force microscope and method of manufacturi

1994-02-09

1995-11-28

Chilcot, Richard

Measuring and testing

Surface and cutting edge testing

Roughness

250306, 250307, G01B 528, H01J 3726

Patent

active

054697336

ABSTRACT:
A cantilever for an atomic force microscope includes a probe and a cantilever body supporting the probe, the probe deflecting in response to an atomic force between said probe and a sample, at least the surface of the probe including one of a resist film and a sputtered film. One method of manufacturing the cantilever includes selectively etching the surface of a silicon substrate to form an etch pit, forming a resist film in at least the etch pit, forming a nitride film on the resist film, forming a glass base plate on the nitride film in a predetermined area not including the etch pit, and removing the silicon substrate. An atomic force microscope is also provided in which the cantilever is used to measure an atomic force between a sample and the probe having a desired film on a surface. A sample surface evaluating method is further provided by which the adhesion between the desired film or substance and the sample surface can be evaluated quantitatively from the measured atomic force without damaging the sample surface.

REFERENCES:
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patent: 5317533 (1994-05-01), Quate et al.
patent: 5334835 (1994-08-01), Nakayama et al.
Chalmers et al., "Determination of Tilted Superlattice Structure by Atomic Force Microscopy", Applied Physics Letter 55, Dec., 1989, pp. 2491-2493.

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