Cantilever displacement detection apparatus

Details Cantilever displacement detection apparatus Cantilever displacement detection apparatus

1993-03-05

1994-03-15

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

250306, G01N 2186

Patent

active

052948048

ABSTRACT:
A cantilever displacement detection apparatus comprises a laser diode for emitting a laser beam functioning as detection beam for displacement detection based on an optical lever method, and a position sensor having two light receiving regions for outputting signals corresponding to the intensity of received light. The laser diode and the position sensor are arranged such that the light beam is passed through an objective lens and made incident slantingly on a mirror provided on a free-end portion of a cantilever and the laser beam reflected by the mirror is passed through the objective lens and made incident on the position sensor.

REFERENCES:
patent: Re33387 (1990-10-01), Binnig
patent: 4914293 (1990-04-01), Hayashi et al.
patent: 5107114 (1992-04-01), Nishioka et al.
patent: 5144128 (1992-09-01), Hasegawa et al.
patent: 5157251 (1992-10-01), Albrecht et al.
patent: 5164791 (1992-11-01), Kubo et al.
patent: 5237859 (1993-08-01), Elings et al.

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