Heating – Processes of heating or heater operation – Treating an article – container – batch or body as a unit
Patent
1984-04-09
1985-07-02
Camby, John J.
Heating
Processes of heating or heater operation
Treating an article, container, batch or body as a unit
432 19, 432 23, 432 26, F27D 300, F27D 700, F27B 904, F27B 322
Patent
active
045265348
ABSTRACT:
A cantilever diffusion tube apparatus includes a quartz cantilever tube having a support end clamped to a laterally movable carriage mechanism and an outer end portion containing a plurality of spaced semiconductor wafers. The cantilever tube is coaxially aligned with a diffusion tube of a diffusion furnace. The support end of the cantilever tube is sealed by a door plate through which a gas tube extends. The wafers are loaded into the cantilever tube through a window opening. The carriage then moves the cantilever tube and wafers therein into the diffusion tube. Reactant gases are caused to flow into the cantilever tube, between the heated wafers therein, and out of the cantilever tube. Then purging gas is caused to flow through the cantilever tube and wafers therein. Withdrawal of the cantilever tube from the diffusion tube is then performed as the purging gas flow continues, avoiding excessive thermal shock, premature exposure of wafers to ambient oxygen and exposure of the wafers to air containing defect-causing particles. The cantilever tube, when contaminated after a number of runs, is easily exchanged for a clean one, avoiding the need for frequent cleaning of the diffusion tube.
REFERENCES:
patent: 4351805 (1982-09-01), Reisman et al.
patent: 4412812 (1983-11-01), Sadowski et al.
Camby John J.
Quartz Engineering & Materials, Inc.
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