Cantilever chip for use in scanning probe microscope

Details Cantilever chip for use in scanning probe microscope Cantilever chip for use in scanning probe microscope

1992-09-08

1994-06-14

Raevis, Robert

Measuring and testing

Surface and cutting edge testing

Roughness

G01B 528

Patent

active

053199618

ABSTRACT:
A cantilever chip has a hold substrate and a film member bonded to the substrate. The film member has a rectangular cantilever portion and a triangular cantilever portion having an inner portion removed. These portions are formed by patterning. Each of the portions has an end fixed to the hold substrate, and a free end provided with a probe. The film member has an alignment end used as a mark to determine the position of the side end face of the hold substrate at the time of the film being bonded to the substrate. The alignment end is divided by notches into the cantilever portions.

REFERENCES:
patent: 4668865 (1987-05-01), Gimzewski et al.
Microfabrication of Cantilever Styli for the Atomic Force Microscope; Albrecht et al.; J. Vac. Sci. Technol. A8(4), Jul./Aug. 1990; pp. 3386-3396.

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